in Proceedings - IMAPS/ACerS 8th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2012
Pages: 542-548
Conference
8Th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, Cicmt 2012, Date: 16 April 2012 through 19 April 2012, Location: Erfurt, Sponsors: International Microelectronics and Packaging Society (IMAPS);The American Ceramic Society (ACerS);IMAPS Deutschland;Inst. Micro-Nanotechnologies MacroNano Ilmenau Univ. Technol.;Mikro-Nano-Thuringen e.V. (MNT)