Experimental Verification of Rarefied Gas Squeezed-Film Damping Models Used in Mems

AuthID
 P-008-EYF
4
Author(s)
Mol, L
·
Cretu, E
·
Wolffenbuttel, RF
Document Type
Proceedings Paper
Year published
2006
Published
in American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS, ISSN: 1096-665X
Conference
2006 Asme International Mechanical Engineering Congress and Exposition, Imece2006, Date: 5 November 2006 through 10 November 2006, Location: Chicago, IL
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Publication Identifiers
SCOPUS: 2-s2.0-84885288915
Source Identifiers
ISSN: 1096-665X
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