Publications

AuthID
P-000-VQ6

Author(s)

Vasco, E

Vazquez, L

Zaldo, C

Coya, C

Document Type

Article

Year published

2001

Published

in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, ISSN: 1071-1023

Volume: 19, Issue: 3, Pages: 812-817 (6)

Conference

13Th International Vaccum Microelectronics Conference, Date: 14 August 2000 through 17 August 2000, Location: Guangzhou

Indexing

Wos^®

Scopus^®

Crossref^®

Google Scholar^®

Publication Identifiers

DOI: 10.1116/1.1370177

SCOPUS: 2-s2.0-0035326378

Wos: WOS:000169366600035

Source Identifiers

ISSN: 1071-1023

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