Piezo Impact System for Printed Board Sub-Micron Precision Positioning

AuthID
P-008-NY3
3
Author(s)
Yamagata, Y
·
Higuchi, T
Document Type
Proceedings Paper
Year published
1997
Published
in IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
Pages: 70
Conference
Proceedings of the 1997 1St Ieee/Asme International Conference on Advanced Intelligent Mechatronics, Aim'97, Date: 16 June 1997 through 20 June 1997, Location: Tokyo, Jpn, Sponsors: IEEE;ASME
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Publication Identifiers
SCOPUS: 2-s2.0-0031369342
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