Analytical Model for the Pull-Intime of Low-Q Mems Devices

AuthID
 P-008-PDS
3
Author(s)
1
Editor(s)
Laudon M.Romanowicz B.
Document Type
Proceedings Paper
Year published
2004
Published
in 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
Volume: 2, Pages: 271-274
Conference
2004 Nsti Nanotechnology Conference and Trade Show - Nsti Nanotech 2004, Date: 7 March 2004 through 11 March 2004, Location: Boston, MA
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-6344287600
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