in MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST in PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS WORKSHOP, ISSN: 1084-6999
Pages: 249-252 (4)
Conference
17Th Ieee International Conference on Micro Electro Mechanical Systems, Date: JAN 25-29, 2004, Location: Maastricht, NETHERLANDS, Sponsors: IEEE Robot & Automat Soc