in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 96, Issue: 1-2, Pages: 302-306 (5)
Conference
10Th International Conference on Ion Implantation Technology, Date: JUN 13-17, 1994, Location: CATANIA, ITALY, Sponsors: CATANIA UNIV, PHYS DEPT, CORIMME
