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Fabrication And Characterization Of Pzt Thin-Film Vibrators For Micromotors
AuthID
P-008-RTY
7
Author(s)
MURALT, P
·
KOHLI, M
·
MAEDER, T
·
KHOLKIN, A
·
BROOKS, K
·
SETTER, N
·
LUTHIER, R
Document Type
Article
Year published
1995
Published
in
SENSORS AND ACTUATORS A-PHYSICAL,
ISSN: 0924-4247
Volume: 48, Issue: 2, Pages: 157-165 (9)
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Scopus
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Publication Identifiers
DOI
:
10.1016/0924-4247(95)00994-9
Scopus
: 2-s2.0-0029304253
Wos
: WOS:A1995RY44600009
Source Identifiers
ISSN
: 0924-4247
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