Interferometric Study of Piezoelectric Degradation in Ferroelectric Thin Films

AuthID
P-008-RTZ
8
Author(s)
Colla, E
·
Brooks, K
·
Muralt, P
·
Kohli, M
·
Maeder, T
·
Taylor, D
·
Setter, N
Document Type
Article
Year published
1995
Published
in MICROELECTRONIC ENGINEERING, ISSN: 0167-9317
Volume: 29, Issue: 1-4, Pages: 261-264 (4)
Conference
1St European Meeting on Integrated Ferroelectrics (Emif 1), at the 8Th European Meeting on Ferroelectrics (Emf 8), Date: JUL 03-05, 1995, Location: NIJMEGEN, NETHERLANDS, Sponsors: European Commiss, GEC Marconi, Philips Res, Siemens, Thomson CSF, Univ Nijmegen Univ, Fac Sci, Host: UNIV NIJMEGEN, FAC SCI
Indexing
Publication Identifiers
Scopus: 2-s2.0-0029513938
Wos: WOS:A1995TP60800053
Source Identifiers
ISSN: 0167-9317
Export Publication Metadata
Marked List
Info
At this moment we don't have any links to full text documens.