On Electron Energy Distribution Function Measurements in Microwave Discharges Sustained by Propagating Surface Waves

AuthID
 P-008-TXA
3
Author(s)
Schluter, H
·
Document Type
Article
Year published
1994
Published
in Plasma Sources Science and Technology, ISSN: 0963-0252
Volume: 3, Issue: 4, Pages: 545-555
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Publication Identifiers
SCOPUS: 2-s2.0-0040370873
Source Identifiers
ISSN: 0963-0252
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