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Correlation Between A-Si : H Surface Oxidation Process and the Performance of Mis Structures

AuthID
P-000-WD1

Author(s)

Aguas, H

Document Type

Article

Year published

2001

Published

in THIN SOLID FILMS, ISSN: 0040-6090

Volume: 383, Issue: 1-2, Pages: 185-188 (4)

Conference

3Rd Symposium O on Thin Film Materials for Large Area Electronics of the E-Mrs 2000 Spring Meeting, Date: MAY 30-JUN 02, 2000, Location: STRASBOURG, FRANCE, Sponsors: French Minist Res, Balzers AG, Unaxis, Jobin Yvon

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Publication Identifiers

DOI: 10.1016/s0040-6090(00)01605-9

SCOPUS: 2-s2.0-0035246805

Wos: WOS:000167378300045

Source Identifiers

ISSN: 0040-6090

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Correlation Between A-Si : H Surface Oxidation Process and the Performance of Mis Structures

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