Publications

Lattice Location of Implanted Cu in Si

AuthID
P-008-X9W

Author(s)

Wahl, U

Correia, JG

Vantomme, A

Langouche, G

Group Author(s)

ISOLDE collaboration

Document Type

Article

Year published

1999

Published

in PHYSICA B-CONDENSED MATTER, ISSN: 0921-4526

Volume: 273-4, Pages: 367-370 (4)

Conference

20Th International Conference on Defects in Semiconductors (Icds-20), Date: JUL 26-30, 1999, Location: BERKELEY, CA, Sponsors: Air Force Off Sci Res, Amer Xtal Technol Inc, Appl Mat Inc, Bell Labs Lucent Technol, Hewlett Packard Lab, IBM, Intel Corp, Lawrence Berkeley Natl Lab, Off Naval Res, Sula Technol, Xeeox Palo Alto Res Ctr

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