Bulk-Micromachined Tunable Fabry-Perot Microinterferometer for the Visible Spectral Range

AuthID
P-008-YJ5
3
Author(s)
Bartek, M
·
Wolffenbuttel, RF
Document Type
Article
Year published
1999
Published
in SENSORS AND ACTUATORS A-PHYSICAL, ISSN: 0924-4247
Volume: 76, Issue: 1-3, Pages: 191-196 (6)
Conference
Eurosensors Xii Meeting, Date: SEP 13-16, 1998, Location: SOUTHAMPTON, ENGLAND
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0343496777
Wos: WOS:000083925200032
Source Identifiers
ISSN: 0924-4247
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