Thin Films' Residual Stress Measurement by Optical Profilometry

AuthID
 P-000-WPR
1
Author(s)
3
Editor(s)
Asundi, AK; Osten, W; Varadan, VK
Document Type
Proceedings Paper
Year published
2001
Published
in ADVANCED PHOTONIC SENSORS AND APPLICATIONS II in PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE), ISSN: 0277-786X
Volume: 4596, Pages: 1-8 (8)
Conference
Advanced Photonic Sensors and Applications Ii Conference, Date: NOV 27-30, 2001, Location: SINGAPORE, SINGAPORE, Sponsors: SPIE, Nanyang Tech Univ
Indexing
Wos®
Scopus®
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-0035771071
Wos: WOS:000174470600001
Source Identifiers
ISSN: 0277-786X
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

A place for researchers and their institutions

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service