Defect Trapping and Annealing for Transition Metal Implants in Group Iii Nitrides

AuthID
 P-008-ZZR
5
Author(s)
Vianden, R
·
Pearton, SJ
·
Abernathy, CR
·
Document Type
Article
Year published
2000
Published
in MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH, ISSN: 1092-5783
Volume: 5, Issue: 5, Pages: e5 (7)
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Publication Identifiers
Scopus: 2-s2.0-3242775414
Wos: WOS:000090104500001
Source Identifiers
ISSN: 1092-5783
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