Publications

Characterization of a Cmos Humidity Sensor Using Different Polyimides as Sensing Films

AuthID
P-000-X1N

Author(s)

Qiu, YY

Azeredo Leme, C

Alcacer, L

Franca, JE

Editor(s)

Bergmann, NW; Abbott, D; Hariz, AJ; Varadan, VK

Document Type

Proceedings Paper

Year published

2001

Published

in ELECTRONICS AND STRUCTURES FOR MEMS II in Proceedings of SPIE, ISSN: 0277-786X

Volume: 4591, Pages: 310-315 (2)

Conference

Conference on Electronics and Structures for Mems Ii, Date: DEC 17-19, 2001, Location: ADELAIDE, AUSTRALIA, Sponsors: SPIE, USAF, Off Sci Res, Asian Off Aerosp Res & Dev, Ctr Biomed Engn, Def Sci & Technol Org, Dept Ind & Trade

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Sources

Publication Identifiers

DOI: 10.1117/12.449161

SCOPUS: 2-s2.0-0035772289

Wos: WOS:000174463500033

Source Identifiers

ISSN: 0277-786X

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Characterization of a Cmos Humidity Sensor Using Different Polyimides as Sensing Films

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