A Microkinetic Model for Doping of Silicon Layers During Molecular-Beam Epitaxy

AuthID
 P-009-2K0
3
Author(s)
Andreev, AY
·
Kuznetsov, VP
Document Type
Article
Year published
1993
Published
in Surface Science, ISSN: 0039-6028
Volume: 297, Issue: 2, Pages: 151-161
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Publication Identifiers
SCOPUS: 2-s2.0-0027697682
Source Identifiers
ISSN: 0039-6028
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