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Processing and Characterisation of Sol-Gel Deposited Ta2O5 and Tio2-Ta2O5 Dielectric Thin Films

AuthID
P-009-2TX

Author(s)

Cappellani, A

Keddie, JL

Barradas, NP

Jackson, SM

Document Type

Article

Year published

1999

Published

in SOLID-STATE ELECTRONICS, ISSN: 0038-1101

Volume: 43, Issue: 6, Pages: 1095-1099 (5)

Conference

Symposium on Materials and Processes for Submicron Technologies, at the E-Mrs Spring Meeting, Date: JUN 16-19, 1998, Location: STRASBOURG, FRANCE, Sponsors: European Mat Res Soc

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Publication Identifiers

DOI: 10.1016/s0038-1101(99)00031-3

SCOPUS: 2-s2.0-0032684609

Wos: WOS:000081181700018

Source Identifiers

ISSN: 0038-1101

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Processing and Characterisation of Sol-Gel Deposited Ta2O5 and Tio2-Ta2O5 Dielectric Thin Films

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Processing and Characterisation of Sol-Gel Deposited Ta2O5 and Tio2-Ta2O5 Dielectric Thin Films

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