Sub-Micron Gap A-Si:h Thin Film Lamé-Mode Resonator Processed at Low Temperature on a Glass Substrate

AuthID
 P-009-3A4
4
Author(s)
Gualdino, A
·
Document Type
Proceedings Paper
Year published
2013
Published
in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages: 1484-1487
Conference
2013 17Th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013, Date: 16 June 2013 through 20 June 2013, Location: Barcelona
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Publication Identifiers
Scopus: 2-s2.0-84891714492
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