in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages: 104-105
Conference
S20Th International Microprocesses and Nanotechnology Conference, Mnc 2007, Date: 5 November 2007 through 8 November 2007, Location: Kyoto, Sponsors: Japan Society of Applied Physics