in MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, ISSN: 0946-7076
Volume: 20, Issue: 4-5, Pages: 793-802 (10)
Conference
Conference on Smart Sensors, Actuators and Mems Within the Spie Europe Symposium on Microtechnologies, Date: APR 24-26, 2013, Location: Grenoble, FRANCE, Sponsors: SPIE EUROPE