On-Chip Integrated Silicon Bulk-Micromachined Soil Moisture Sensor Based on the Dphp Method

AuthID
 P-000-XXW
3
Author(s)
1
Editor(s)
Obermeier, E
Document Type
Proceedings Paper
Year published
2001
Published
in TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2
Pages: 316-319 (4)
Conference
11Th International Conference on Solid-State Sensors and Actuators, Date: JUN 10-14, 2001, Location: MUNICH, GERMANY, Sponsors: AESCULAP AG & Co KG, Robert Bosch GmbH, DiamlerChrysler AG, Deutsch Forsch Gemeinsch, EADS Deutschland GmbH, Elsevier Sci, EUROPRACTICE, Fraunhofer IMS Munchen, 1st Sensor Technol, GEFRAN SPA, HL Planartech GmbH, Infineon Technol AG, Inst Phys Publ, KELLER AG, Kistler Instrumente AG, MEMS Ind Grp, Regier von Oberbayern, SCHMIDT Feintechn GmbH, Springer Verlag Heidelberg, TEMIC, TU Berlin MAT, IEEE Electron Devices Soc
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Wos: WOS:000172547800075
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