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Fib Patterning of Dielectric, Metallized and Graphene Membranes: A Comparative Study
AuthID
P-009-CFW
18
Author(s)
Hemamouche, A
·
Morin, A
·
Bourhis, E
·
Toury, B
·
Tarnaud, E
·
Mathe, J
·
Guegan, P
·
Madouri, A
·
Lafosse, X
·
Ulysse, C
·
Gullet, S
·
Patriarche, G
·
Auvray, L
·
Montel, F
·
Wilmart, Q
·
Placais, B
·
Yates, J
·
Gierak, J
Document Type
Article
Year published
2014
Published
in
MICROELECTRONIC ENGINEERING,
ISSN: 0167-9317
Volume: 121, Pages: 87-91 (5)
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®
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®
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®
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®
Metadata
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Publication Identifiers
DOI
:
10.1016/j.mee.2014.03.020
Scopus
: 2-s2.0-84899096785
Wos
: WOS:000341471500022
Source Identifiers
ISSN
: 0167-9317
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