Ion Sputtering of Cathode Surface in a Hollow Cathode Discharge

AuthID
 P-009-DZ2
4
Author(s)
Tomova, Z
·
Steflekova, V
·
Zhechev, D
Document Type
Article
Year published
2008
Published
in Vacuum, ISSN: 0042-207X
Volume: 82, Issue: 5, Pages: 455-458
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Publication Identifiers
SCOPUS: 2-s2.0-37049029177
Source Identifiers
ISSN: 0042-207X
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