Indium Oxides by Reactive Ion Beam Assisted Evaporation: From Material Study to Device Application

AuthID
 P-009-JYD
4
Author(s)
Wang, K
·
Chaji, R
·
Nathan, A
Document Type
Article
Year published
2009
Published
in Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, ISSN: 1071-1023
Volume: 27, Issue: 2, Pages: 612-617
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Publication Identifiers
SCOPUS: 2-s2.0-64549109404
Source Identifiers
ISSN: 1071-1023
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