Influence of Low Energy Argon Plasma Treatment on the Moisture Barrier Performance of Hot Wire-Cvd Grown Sinx Multilayers

AuthID
 P-009-MA7
7
Author(s)
Bonnassieux, Y
·
Bouree, JE
Document Type
Article
Year published
2014
Published
in JAPANESE JOURNAL OF APPLIED PHYSICS, ISSN: 0021-4922
Volume: 53, Issue: 5, Pages: 05FM05 (5)
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-84903315834
Wos: WOS:000338316200107
Source Identifiers
ISSN: 0021-4922
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

A place for researchers and their institutions

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service