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An Asic for Readout of Post-Processed Thin-Film Mems Resonators by Employing Capacitive Interfacing and Active Parasitic Cancellation

AuthID
P-009-R4G

Author(s)

Huang, L

Rieutort Louis, W

Gualdino, A

Teagno, L

Hu, Y

Mouro, J

Sanz Robinson, J

Sturm, JC

Wagner, S

Chu, V

Conde, JP

Verma, N

Document Type

Proceedings Paper

Year published

2014

Published

in IEEE Symposium on VLSI Circuits, Digest of Technical Papers

Conference

28Th Ieee Symposium on Vlsi Circuits, Vlsic 2014, Date: 10 June 2014 through 13 June 2014, Location: Honolulu, HI, Sponsors: IEEE Solid-State Circuits Society;Japan Society of Applied Physics

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Publication Identifiers

DOI: 10.1109/vlsic.2014.6858442

SCOPUS: 2-s2.0-84905653387

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An Asic for Readout of Post-Processed Thin-Film Mems Resonators by Employing Capacitive Interfacing and Active Parasitic Cancellation

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An Asic for Readout of Post-Processed Thin-Film Mems Resonators by Employing Capacitive Interfacing and Active Parasitic Cancellation

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