Influence of the Target-Substrate Distance on the Properties of Indium Tin Oxide Films Prepared by Radio Frequency Reactive Magnetron Sputtering

AuthID
P-000-ZNJ
2
Author(s)
Document Type
Article
Year published
2000
Published
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, ISSN: 0734-2101
Volume: 18, Issue: 4, Pages: 1668-1671 (4)
Conference
46Th National Symposium of the American-Vacuum-Society, Date: OCT 25-29, 1999, Location: SEATTLE, WASHINGTON, Sponsors: Amer Vacuum Soc
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Publication Identifiers
Scopus: 2-s2.0-0034227044
Wos: WOS:000088277000025
Source Identifiers
ISSN: 0734-2101
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