Effect of Peak Target Power on the Properties of Cr Thin Films Sputtered by Hipims in Deep Oscillation Magnetron Sputtering (Doms) Mode

AuthID
 P-00A-1C5
4
Author(s)
Ferreira, F
·
Document Type
Article
Year published
2014
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 258, Pages: 249-256 (8)
Indexing
Wos®
Scopus®
Crossref®16
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-84912525107
Wos: WOS:000346895000031
Source Identifiers
ISSN: 0257-8972
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