Analytical Model and Measurements of the Target Erosion Depth Profile of Balanced and Unbalanced Planar Magnetron Cathodes

AuthID
 P-00A-1RS
5
Author(s)
Document Type
Article
Year published
2014
Published
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 23, Issue: 6, Pages: 065031 (12)
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Publication Identifiers
SCOPUS: 2-s2.0-84915750012
Wos: WOS:000345781300051
Source Identifiers
ISSN: 0963-0252
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