Publications

Low Substrate Temperature Deposition of Amorphous and Microcrystalline Silicon Films on Plastic Substrates by Hot-Wire Chemical Vapor Deposition

AuthID
P-001-076

Author(s)

Alpuim, P

Chu, V

Conde, JP

Document Type

Article

Year published

2000

Published

in JOURNAL OF NON-CRYSTALLINE SOLIDS, ISSN: 0022-3093

Volume: 266, Pages: 110-114 (5)

Conference

18Th International Conference on Amorphous and Microcrystalline Semiconductors (Icams 18), Date: AUG 23-27, 1999, Location: SNOWBIRD, UT, Sponsors: Energy Convers Devices, Japan Steelworks Ltd, MVSystems Inc, Natl Renewable Energy Lab, Princeton Univ, Sanyo Elect Corp, Sony Corp, Syracuse Univ, United Solar Syst Corp, Univ Utah, Xerox Corp

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