Pressure Effects on the Dissipative Behavior of Nanocrystalline Diamond Microelectromechanical Resonators

AuthID
P-00A-6WK
Document Type
Article
Year published
2015
Published
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 25, Issue: 2, Pages: 025019 (10)
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Publication Identifiers
Scopus: 2-s2.0-84922041642
Wos: WOS:000349106800020
Source Identifiers
ISSN: 0960-1317
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