Rbs Characterization of the Iridium Diffusion in Silicon

AuthID
 P-001-0RK
6
Author(s)
Rodriguez, A
·
Gonzalez, C
·
Rodriguez, T
·
da Silva, MF
·
Soares, JC
Document Type
Article
Year published
2000
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 161, Pages: 663-667 (5)
Conference
14Th International Conference on Ion Beam Analysis/6Th European Conference on Accelerators in Applied Research and Technology, Date: JUL 26-30, 1999, Location: DRESEDEN, GERMANY, Sponsors: Res Ctr Rossendorf, Inst Ion Beam Phys & Mat Res
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Publication Identifiers
SCOPUS: 2-s2.0-0343627953
Wos: WOS:000086204100125
Source Identifiers
ISSN: 0168-583X
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