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Low Temperature Sub-Micron Gap Thin-Film Silicon Resonators on Glass Substrate

AuthID
P-00A-9MH

Author(s)

Mouro, J

Gualdino, A

Teagno, L

Chu, V

Conde, JP

Editor(s)

Sberveglieri, G; Ferrari, V

Document Type

Proceedings Paper

Year published

2014

Published

in 28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014) in Procedia Engineering, ISSN: 1877-7058

Volume: 87, Pages: 1418-1421 (4)

Conference

28Th European Conference on Solid-State Transducers (Eurosensors), Date: SEP 07-10, 2014, Location: Brescia, ITALY, Sponsors: Natl Res Council, AISEM

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Publication Identifiers

DOI: 10.1016/j.proeng.2014.11.710

Scopus: 2-s2.0-84923381817

Wos: WOS:000369531700343

Source Identifiers

ISSN: 1877-7058

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