Application of Thin-Film Micromachining for Large-Area Substrates

AuthID
P-001-5AX
4
Author(s)
Boucinha, M
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Soares, V
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5
Editor(s)
Branz, HM; Collins, RW; Okamoto, H; Guha, S; Schropp, R
Document Type
Proceedings Paper
Year published
1999
Published
in AMORPHOUS AND HETEROGENEOUS SILICON THIN FILMS: FUNDAMENTALS TO DEVICES-1999 in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 557, Pages: 799-807 (9)
Conference
Symposium on Amorphous and Heterogeneous Silicon Thin Film - Fundamentals to Devices-1999 Held at the 1999 Mrs Spring Meeting, Date: APR 05-09, 1999, Location: SAN FRANCISCO, CA, Sponsors: Mat Res Soc, Akzo Nobel Chem & Coatings, Energy Convers Devices Inc, Fuji Elect Co, MVSyst Inc, Natl Renewable Energy Lab, Sanyo Elect Co, Solarex Corp, SONY Corp, United Solar Syst Corp, Voltaix Inc
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0033298795
Wos: WOS:000085825300123
Source Identifiers
ISSN: 0272-9172
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