Patterned Surfaces in P-Type Silicon by Photodefined Etching

AuthID
 P-001-5C6
5
Author(s)
Document Type
Article
Year published
1999
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 138, Issue: 1-4, Pages: 330-334 (5)
Conference
Symposium on Surface Processing - Laser, Lamp, Plasma, at the Annual Spring Meeting of the European-Materials-Society (E-Mrs 96), Date: JUN 16-19, 1996-1998, Location: STRASBOURG, FRANCE, Sponsors: European Mat Soc
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Publication Identifiers
SCOPUS: 2-s2.0-0345921697
Wos: WOS:000078576400064
Source Identifiers
ISSN: 0169-4332
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