Effects of Adhesion Layer (Ti or Zr) and Pt Deposition Temperature on the Properties of Pzt Thin Films Deposited by Rf Magnetron Sputtering

AuthID
 P-000-3RT
6
Author(s)
Document Type
Article
Year published
2005
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 243, Issue: 1-4, Pages: 113-124 (12)
Indexing
Wos®
Scopus®
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Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-14544269897
Wos: WOS:000227853400017
Source Identifiers
ISSN: 0169-4332
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