Excimer Laser Micromachining of Al2O3-Tic Ceramics

AuthID
 P-001-600
3
Author(s)
Document Type
Proceedings Paper
Year published
1999
Published
in MICROENGINEERING 99, PROCEEDINGS
Pages: 169-175 (7)
Conference
Congress for Microsystems and Precision Engineering (Microengineering 99), Date: SEP 29-OCT 01, 1999, Location: STUTTGART, GERMANY, Sponsors: Inst Mikrotech Mainz GmbH, Messe Stuttgart Int, ZVEI, IPA, LVI, VDI, GMM
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Wos: WOS:000165284600023
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