Publications

AuthID
P-001-889

Author(s)

Willeke, G

Bitnar, B

Kloc, C

Bucher, E

Document Type

Article

Year published

1998

Published

in SEMICONDUCTOR SCIENCE AND TECHNOLOGY, ISSN: 0268-1242

Volume: 13, Issue: 4, Pages: 440-443 (4)

Indexing

Wos^®

Scopus^®

Crossref^®

Google Scholar^®

Publication Identifiers

DOI: 10.1088/0268-1242/13/4/015

SCOPUS: 2-s2.0-0032050294

Wos: WOS:000073014500015

Source Identifiers

ISSN: 0268-1242

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