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Undoped and Doped Crystalline Silicon Films Obtained by Nd-Yag Laser
AuthID
P-001-88G
3
Author(s)
Ferreira, I
·
Carvalho, J
·
Martins, R
Document Type
Article
Year published
1998
Published
in
THIN SOLID FILMS,
ISSN: 0040-6090
Volume: 317, Issue: 1-2, Pages: 140-143 (4)
Conference
5Th European Vacuum Conference (Evc 5) / 10Th International Conference on Thin Films (Ictf 10),
Date:
SEP 23-27, 1996,
Location:
SALAMANCA, SPAIN,
Sponsors:
Spanish Vacuum Soc, Int Union Vacuum Sci Technol & Applicat, Vacuum Sci & Thin Film Div,
Host:
UNIV SALAMANCA
Indexing
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Publication Identifiers
DOI
:
10.1016/s0040-6090(97)00511-7
SCOPUS
: 2-s2.0-0032049889
Wos
: WOS:000074517700034
Source Identifiers
ISSN
: 0040-6090
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