Investigation of the Amorphous to Microcrystalline Phase Transition of Thin Film Silicon Produced by Pecvd

AuthID
 P-001-88H
6
Author(s)
Macarico, A
·
Nunes, R
·
Bicho, A
·
Document Type
Article
Year published
1998
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 317, Issue: 1-2, Pages: 144-148 (5)
Conference
5Th European Vacuum Conference (Evc 5) / 10Th International Conference on Thin Films (Ictf 10), Date: SEP 23-27, 1996, Location: SALAMANCA, SPAIN, Sponsors: Spanish Vacuum Soc, Int Union Vacuum Sci Technol & Applicat, Vacuum Sci & Thin Film Div, Host: UNIV SALAMANCA
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Publication Identifiers
SCOPUS: 2-s2.0-0032048851
Wos: WOS:000074517700035
Source Identifiers
ISSN: 0040-6090
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