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Maskless Fabrication of 3-Dimensional Microstructures in Pmma Using a Nuclear Microprobe
AuthID
P-001-8DY
4
Author(s)
de Kerckhove, DG
·
Breese, MBH
·
Marsh, MA
·
Grime, GW
Document Type
Article
Year published
1998
Published
in
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,
ISSN: 0168-583X
Volume: 136, Pages: 379-384 (6)
Conference
13Th International Conference on Ion Beam Analysis (Iba-13),
Date:
JUL 27-AUG 01, 1997,
Location:
LISBON, PORTUGAL
Indexing
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®
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Publication Identifiers
DOI
:
10.1016/s0168-583x(97)00876-8
SCOPUS
: 2-s2.0-0032020295
Wos
: WOS:000074380400066
Source Identifiers
ISSN
: 0168-583X
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