Properties of Indium Tin Oxide (Ito) Films Prepared by Rf Reactive Magnetron Sputtering at Different Pressures

AuthID
 P-001-B2C
2
Author(s)
Document Type
Article
Year published
1997
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 303, Issue: 1-2, Pages: 151-155 (5)
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Publication Identifiers
SCOPUS: 2-s2.0-0031191845
Wos: WOS:A1997XM12200023
Source Identifiers
ISSN: 0040-6090
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