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Etching of Amorphous Al2O3 Produced by Ion Implantation
AuthID
P-001-BJ3
6
Author(s)
McHargue, CJ
·
Hunn, JD
·
Joslin, DL
·
Alves, E
·
daSilva, MF
·
Soares, JC
Document Type
Article
Year published
1997
Published
in
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,
ISSN: 0168-583X
Volume: 127, Pages: 596-598 (3)
Conference
10Th International Conference on Ion Beam Modification of Materials (Ibmm-96),
Date:
SEP 01-06, 1996,
Location:
ALBUQUERQUE, NM
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Metadata
Sources
Publication Identifiers
DOI
:
10.1016/s0168-583x(96)01139-1
SCOPUS
: 2-s2.0-0031547718
Wos
: WOS:A1997XG60500135
Source Identifiers
ISSN
: 0168-583X
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