Comparison of Computer Generated and Erda Depth Profiles of Oxygen Implanted into Silicon with Plasma Immersion Ion Implantation

AuthID
 P-001-BQT
3
Author(s)
Mandl, S
Document Type
Article
Year published
1997
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 124, Issue: 1, Pages: 63-68 (6)
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-0031123839
Wos: WOS:A1997WU92600009
Source Identifiers
ISSN: 0168-583X
Export Publication Metadata
Marked List
 Add to Marked List
Info
At this moment we don't have any links to full text documens.

A place for researchers and their institutions

Useful Links

Get Help

© 2024 CRACS & Inesc TEC - All Rights Reserved Privacy Policy | Terms of Service