Characterization of Titanium Nitride Films Prepared by Dc Reactive Magnetron Sputtering at Different Nitrogen Pressures

AuthID
 P-001-BSP
2
Author(s)
Document Type
Article
Year published
1997
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 90, Issue: 1-2, Pages: 64-70 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-0031098092
Wos: WOS:A1997WX00200009
Source Identifiers
ISSN: 0257-8972
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