Improved A-Si:h Tft Performance Using A-Sixn1-X/A-Sixc1-X Stack Dielectrics

AuthID
 P-001-CDE
4
Author(s)
4
Editor(s)
Hatalis, MK; Kanicki, J; Summers, CJ; Funada, F
Document Type
Proceedings Paper
Year published
1997
Published
in FLAT PANEL DISPLAY MATERIALS II in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 424, Pages: 59-64 (4)
Conference
Symposium on Flat Panel Display Materials Ii, at the 1996 Mrs Spring Meeting, Date: APR 08-12, 1996, Location: SAN FRANCISCO, CA, Sponsors: Mat Res Soc, Xerox Co, IBM, SHARP
Indexing
Wos®
Publication Identifiers
Wos: WOS:A1997BH30A00009
Source Identifiers
ISSN: 0272-9172
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