The Modification of Mechanical Properties and Adhesion of Boron Carbide Sputtered Films by Ion Implantation

AuthID
 P-001-DMD
3
Author(s)
Chiang, CI
·
Document Type
Article
Year published
1996
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 117, Issue: 4, Pages: 408-414 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-0030270352
Wos: WOS:A1996VL21800012
Source Identifiers
ISSN: 0168-583X
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