Defect Development and Dopant Location Due to Elevated Temperature Implantation of Inp with Mev Zinc Ions

AuthID
P-001-E7Z
5
Author(s)
Krause, H
·
Vogt, J
·
Document Type
Article
Year published
1996
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 113, Issue: 1-4, Pages: 209-213 (5)
Conference
4Th European Conference on Accelerators in Applied Research and Technology (Ecaart-4), Date: AUG 29-SEP 02, 1995, Location: ZURICH, SWITZERLAND, Host: SWISS FED INST TECHNOL
Indexing
Publication Identifiers
Scopus: 2-s2.0-0030166112
Wos: WOS:A1996UW20200047
Source Identifiers
ISSN: 0168-583X
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