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Microcrystalline Silicon Thin-Films Prepared By Rf Reactive Magnetron Sputter-Deposition
AuthID
P-001-FZJ
5
Author(s)
CERQUEIRA, MF
·
ANDRITSCHKY, M
·
REBOUTA, L
·
FERREIRA, JA
·
DASILVA, MF
Document Type
Article
Year published
1995
Published
in
VACUUM,
ISSN: 0042-207X
Volume: 46, Issue: 12, Pages: 1385-1390 (6)
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Publication Identifiers
DOI
:
10.1016/0042-207x(95)00158-1
Scopus
: 2-s2.0-0029600563
Wos
: WOS:A1995RU41800007
Source Identifiers
ISSN
: 0042-207X
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